Design and modeling of a Micro robot Leg by COMSOL Multiphysics

Srinivasa Rao Karumuri

Abstract

This example describes the modeling of one of the legs of a silicon microrobot. The microrobot uses a technique based on polyimide V-groove joints to get each of the legs to move. The polyimide has a relatively high coefficient of thermal expansion α, which causes the leg to bend slightly when the polyimide is heated. Putting several V-grooves on each leg provides sufficient deflection.