Research Article
Esmeryan KD
Abstract
Acoustic wave chemical sensors have several features such as high resolution and sensitivity, fast responserecovery time, superb overall stability and high dynamic range, which determine their appropriateness for gas analyte detection. The usability of acoustic sensors requires specific knowledge relating to the sensing mechanism, the properties of different acoustic wave modes and the criteria for selection of sensitive layers, involved in a wide range of gas-phase applications. This paper reports the most commonly used metal oxide film coated acoustic wave sensors, as well as their operation principle and practical application. Several advantages and disadvantages of each particular acoustic wave device are identified and the selectivity of the sensors is presented and discussed.